BibTeX record journals/sensors/XuLFPB21

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@article{DBLP:journals/sensors/XuLFPB21,
  author       = {Min Xu and
                  Zhi Li and
                  Michael Fahrbach and
                  Erwin Peiner and
                  Uwe Brand},
  title        = {Investigating the Trackability of Silicon Microprobes in High-Speed
                  Surface Measurements},
  journal      = {Sensors},
  volume       = {21},
  number       = {5},
  pages        = {1557},
  year         = {2021},
  url          = {https://doi.org/10.3390/s21051557},
  doi          = {10.3390/S21051557},
  timestamp    = {Sat, 09 Apr 2022 12:31:26 +0200},
  biburl       = {https://dblp.org/rec/journals/sensors/XuLFPB21.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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