"Investigating the Trackability of Silicon Microprobes in High-Speed ..."

Min Xu et al. (2021)

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DOI: 10.3390/S21051557

access: open

type: Journal Article

metadata version: 2022-04-09

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Min Xu, Zhi Li, Michael Fahrbach, Erwin Peiner, Uwe Brand:
Investigating the Trackability of Silicon Microprobes in High-Speed Surface Measurements. Sensors 21(5): 1557 (2021)

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