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BibTeX record journals/mr/Naoe15
@article{DBLP:journals/mr/Naoe15, author = {Takuya Naoe}, title = {Case study: Root cause of fluorine detection during TiN {ARC} layer corrosion of AlSiCu metal lines}, journal = {Microelectron. Reliab.}, volume = {55}, number = {2}, pages = {411--417}, year = {2015}, url = {https://doi.org/10.1016/j.microrel.2014.11.007}, doi = {10.1016/J.MICROREL.2014.11.007}, timestamp = {Sat, 22 Feb 2020 19:27:47 +0100}, biburl = {https://dblp.org/rec/journals/mr/Naoe15.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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