"Case study: Root cause of fluorine detection during TiN ARC layer ..."

Takuya Naoe (2015)

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DOI: 10.1016/J.MICROREL.2014.11.007

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type: Journal Article

metadata version: 2020-02-22

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Takuya Naoe:
Case study: Root cause of fluorine detection during TiN ARC layer corrosion of AlSiCu metal lines. Microelectron. Reliab. 55(2): 411-417 (2015)

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