BibTeX record journals/mr/LiVDPZK03

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@article{DBLP:journals/mr/LiVDPZK03,
  author       = {Yuan Li and
                  Klaas Jelle Veenstra and
                  J{\'{e}}r{\^{o}}me Dubois and
                  Lei Peters{-}Wu and
                  Agnes van Zomeren and
                  Fred G. Kuper},
  title        = {Reservoir effect and maximum allowed {VIA} misalignment for AlCu interconnect
                  with tungsten {VIA} plug},
  journal      = {Microelectron. Reliab.},
  volume       = {43},
  number       = {9-11},
  pages        = {1449--1454},
  year         = {2003},
  url          = {https://doi.org/10.1016/S0026-2714(03)00257-9},
  doi          = {10.1016/S0026-2714(03)00257-9},
  timestamp    = {Sat, 22 Feb 2020 19:27:56 +0100},
  biburl       = {https://dblp.org/rec/journals/mr/LiVDPZK03.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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