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BibTeX record journals/mr/LiVDPZK03
@article{DBLP:journals/mr/LiVDPZK03, author = {Yuan Li and Klaas Jelle Veenstra and J{\'{e}}r{\^{o}}me Dubois and Lei Peters{-}Wu and Agnes van Zomeren and Fred G. Kuper}, title = {Reservoir effect and maximum allowed {VIA} misalignment for AlCu interconnect with tungsten {VIA} plug}, journal = {Microelectron. Reliab.}, volume = {43}, number = {9-11}, pages = {1449--1454}, year = {2003}, url = {https://doi.org/10.1016/S0026-2714(03)00257-9}, doi = {10.1016/S0026-2714(03)00257-9}, timestamp = {Sat, 22 Feb 2020 19:27:56 +0100}, biburl = {https://dblp.org/rec/journals/mr/LiVDPZK03.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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