BibTeX record journals/mr/HeinESWB16

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@article{DBLP:journals/mr/HeinESWB16,
  author       = {Verena Hein and
                  Marco Erstling and
                  Raj Sekar Sethu and
                  Kirsten Weide{-}Zaage and
                  Tianlin Bai},
  title        = {Reliability evaluation of tungsten donut-via as an element of the
                  highly robust metallization},
  journal      = {Microelectron. Reliab.},
  volume       = {64},
  pages        = {259--265},
  year         = {2016},
  url          = {https://doi.org/10.1016/j.microrel.2016.07.136},
  doi          = {10.1016/J.MICROREL.2016.07.136},
  timestamp    = {Sat, 22 Feb 2020 19:27:10 +0100},
  biburl       = {https://dblp.org/rec/journals/mr/HeinESWB16.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}