BibTeX record journals/mr/EriguchiHN01

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@article{DBLP:journals/mr/EriguchiHN01,
  author       = {Koji Eriguchi and
                  Yoshinao Harada and
                  Masaaki Niwa},
  title        = {Effects of base layer thickness on reliability of {CVD} Si\({}_{\mbox{3}}\)N\({}_{\mbox{4}}\)
                  stack gate dielectrics},
  journal      = {Microelectron. Reliab.},
  volume       = {41},
  number       = {4},
  pages        = {587--595},
  year         = {2001},
  url          = {https://doi.org/10.1016/S0026-2714(00)00247-X},
  doi          = {10.1016/S0026-2714(00)00247-X},
  timestamp    = {Sat, 22 Feb 2020 19:29:28 +0100},
  biburl       = {https://dblp.org/rec/journals/mr/EriguchiHN01.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}

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