BibTeX record journals/mr/AtanassovaS02

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@article{DBLP:journals/mr/AtanassovaS02,
  author       = {Elena Atanassova and
                  Dejan Spasov},
  title        = {Thermal Ta\({}_{\mbox{2}}\)O\({}_{\mbox{5}}\)--alternative to SiO\({}_{\mbox{2}}\)
                  for storage capacitor application},
  journal      = {Microelectron. Reliab.},
  volume       = {42},
  number       = {8},
  pages        = {1171--1177},
  year         = {2002},
  url          = {https://doi.org/10.1016/S0026-2714(02)00088-4},
  doi          = {10.1016/S0026-2714(02)00088-4},
  timestamp    = {Sat, 22 Feb 2020 19:28:43 +0100},
  biburl       = {https://dblp.org/rec/journals/mr/AtanassovaS02.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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