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BibTeX record journals/micromachines/Qu16
@article{DBLP:journals/micromachines/Qu16, author = {Hongwei Qu}, title = {{CMOS} {MEMS} Fabrication Technologies and Devices}, journal = {Micromachines}, volume = {7}, number = {1}, pages = {14}, year = {2016}, url = {https://doi.org/10.3390/mi7010014}, doi = {10.3390/MI7010014}, timestamp = {Mon, 29 Jul 2019 15:59:18 +0200}, biburl = {https://dblp.org/rec/journals/micromachines/Qu16.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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