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"CMOS MEMS Fabrication Technologies and Devices."

Name: dblp XML data dump
Creator: Schloss Dagstuhl - Leibniz Center for Informatics
Published: 1993
License: https://creativecommons.org/publicdomain/zero/1.0/
Keywords: dblp, XML, computer science, scholarly publications, metadata

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Hongwei Qu (2016)

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Dagstuhl

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DOI: 10.3390/MI7010014

access: open

type: Journal Article

metadata version: 2019-07-29

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Hongwei Qu:
CMOS MEMS Fabrication Technologies and Devices. Micromachines 7(1): 14 (2016)

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last updated on 2019-07-29 15:59 CEST by the dblp team

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