BibTeX record journals/micromachines/PuchadesKF12

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@article{DBLP:journals/micromachines/PuchadesKF12,
  author       = {Ivan Puchades and
                  Mustafa Koz and
                  Lynn Fuller},
  title        = {Mechanical Vibrations of Thermally Actuated Silicon Membranes},
  journal      = {Micromachines},
  volume       = {3},
  number       = {2},
  pages        = {255--269},
  year         = {2012},
  url          = {https://doi.org/10.3390/mi3020255},
  doi          = {10.3390/MI3020255},
  timestamp    = {Mon, 26 Oct 2020 08:44:26 +0100},
  biburl       = {https://dblp.org/rec/journals/micromachines/PuchadesKF12.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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