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"Mechanical Vibrations of Thermally Actuated Silicon Membranes."

Ivan Puchades, Mustafa Koz, Lynn Fuller (2012)

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DOI: 10.3390/MI3020255

access: open

type: Journal Article

metadata version: 2020-10-26

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  dblp key:
  - journals/micromachines/PuchadesKF12
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  persistent URL:
  - https://dblp.org/rec/journals/micromachines/PuchadesKF12
Ivan Puchades, Mustafa Koz, Lynn Fuller:
Mechanical Vibrations of Thermally Actuated Silicon Membranes. Micromachines 3(2): 255-269 (2012)

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