BibTeX record journals/jzusc/ZhuLCYY12

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@article{DBLP:journals/jzusc/ZhuLCYY12,
  author       = {Jiao{-}jiao Zhu and
                  Xiao{-}hua Luo and
                  Li{-}sheng Chen and
                  Yi Ye and
                  Xiaolang Yan},
  title        = {Scratch-concerned yield modeling for {IC} manufacturing involved with
                  a chemical mechanical polishing process},
  journal      = {J. Zhejiang Univ. Sci. {C}},
  volume       = {13},
  number       = {5},
  pages        = {376--384},
  year         = {2012},
  url          = {https://doi.org/10.1631/jzus.C1100242},
  doi          = {10.1631/JZUS.C1100242},
  timestamp    = {Wed, 13 May 2020 17:18:35 +0200},
  biburl       = {https://dblp.org/rec/journals/jzusc/ZhuLCYY12.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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