BibTeX record journals/ijmtm/KawasegiMYTOATMM06

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@article{DBLP:journals/ijmtm/KawasegiMYTOATMM06,
  author       = {Noritaka Kawasegi and
                  Noboru Morita and
                  Shigeru Yamada and
                  Noboru Takano and
                  Tatsuo Oyama and
                  Kiwamu Ashida and
                  Jun Taniguchi and
                  Iwao Miyamoto and
                  Sadao Momota},
  title        = {Etching characteristics of a silicon surface induced by focused ion
                  beam irradiation},
  journal      = {Int. J. Manuf. Technol. Manag.},
  volume       = {9},
  number       = {1/2},
  pages        = {34--50},
  year         = {2006},
  url          = {https://doi.org/10.1504/IJMTM.2006.009984},
  doi          = {10.1504/IJMTM.2006.009984},
  timestamp    = {Thu, 04 Jun 2020 19:36:20 +0200},
  biburl       = {https://dblp.org/rec/journals/ijmtm/KawasegiMYTOATMM06.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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