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BibTeX record journals/ieicetc/SaitoYMKAKH22
@article{DBLP:journals/ieicetc/SaitoYMKAKH22, author = {Kentaro Saito and Kazuki Yoshida and Masanori Miura and Kensaku Kanomata and Bashir Ahmmad and Shigeru Kubota and Fumihiko Hirose}, title = {Low-Temperature Atomic Layer Deposition of AlN Using Trimethyl Aluminum and Plasma Excited Ar Diluted Ammonia}, journal = {{IEICE} Trans. Electron.}, volume = {105-C}, number = {10}, pages = {596--603}, year = {2022}, url = {https://doi.org/10.1587/transele.2021fup0001}, doi = {10.1587/TRANSELE.2021FUP0001}, timestamp = {Mon, 26 Jun 2023 20:57:52 +0200}, biburl = {https://dblp.org/rec/journals/ieicetc/SaitoYMKAKH22.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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