BibTeX record journals/ieicetc/SaitoYMKAKH22

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@article{DBLP:journals/ieicetc/SaitoYMKAKH22,
  author       = {Kentaro Saito and
                  Kazuki Yoshida and
                  Masanori Miura and
                  Kensaku Kanomata and
                  Bashir Ahmmad and
                  Shigeru Kubota and
                  Fumihiko Hirose},
  title        = {Low-Temperature Atomic Layer Deposition of AlN Using Trimethyl Aluminum
                  and Plasma Excited Ar Diluted Ammonia},
  journal      = {{IEICE} Trans. Electron.},
  volume       = {105-C},
  number       = {10},
  pages        = {596--603},
  year         = {2022},
  url          = {https://doi.org/10.1587/transele.2021fup0001},
  doi          = {10.1587/TRANSELE.2021FUP0001},
  timestamp    = {Mon, 26 Jun 2023 20:57:52 +0200},
  biburl       = {https://dblp.org/rec/journals/ieicetc/SaitoYMKAKH22.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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