BibTeX record journals/ibmrd/WestDA05

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@article{DBLP:journals/ibmrd/WestDA05,
  author       = {Alan C. West and
                  Hariklia Deligianni and
                  Panayotis C. Andricacos},
  title        = {Electrochemical planarization of interconnect metallization},
  journal      = {{IBM} J. Res. Dev.},
  volume       = {49},
  number       = {1},
  pages        = {37--48},
  year         = {2005},
  url          = {http://www.research.ibm.com/journal/rd/491/west.pdf},
  timestamp    = {Tue, 06 Jul 2021 17:43:19 +0200},
  biburl       = {https://dblp.org/rec/journals/ibmrd/WestDA05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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