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"Electrochemical planarization of interconnect metallization."

Alan C. West, Hariklia Deligianni, Panayotis C. Andricacos (2005)

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DOI: —

access: closed

type: Journal Article

metadata version: 2021-07-06

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  dblp key:
  - journals/ibmrd/WestDA05
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  persistent URL:
  - https://dblp.org/rec/journals/ibmrd/WestDA05
Alan C. West, Hariklia Deligianni, Panayotis C. Andricacos:
Electrochemical planarization of interconnect metallization. IBM J. Res. Dev. 49(1): 37-48 (2005)

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