BibTeX record journals/bstj/DowdCRZ70

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@article{DBLP:journals/bstj/DowdCRZ70,
  author       = {Patrick G. Dowd and
                  Morton J. Cowan and
                  Peter E. Rosenfeld and
                  A. Zacharias},
  title        = {Device photolithography: The primary pattern generator part iii-the
                  control system},
  journal      = {Bell Syst. Tech. J.},
  volume       = {49},
  number       = {9},
  pages        = {2061--2067},
  year         = {1970},
  url          = {https://doi.org/10.1002/j.1538-7305.1970.tb02512.x},
  doi          = {10.1002/J.1538-7305.1970.TB02512.X},
  timestamp    = {Tue, 03 Mar 2020 16:59:41 +0100},
  biburl       = {https://dblp.org/rec/journals/bstj/DowdCRZ70.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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