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"Device photolithography: The primary pattern generator part iii-the ..."
Patrick G. Dowd et al. (1970)
- Patrick G. Dowd, Morton J. Cowan, Peter E. Rosenfeld, A. Zacharias:
Device photolithography: The primary pattern generator part iii-the control system. Bell Syst. Tech. J. 49(9): 2061-2067 (1970)
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