BibTeX record conf/wsc/DeenenAF22

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@inproceedings{DBLP:conf/wsc/DeenenAF22,
  author       = {Patrick C. Deenen and
                  Rick A. M. Adriaensen and
                  John W. Fowler},
  title        = {Building a Digital Twin of the Photolithography Area of {A} Real-World
                  Wafer {FAB} To Validate Improved Production Control},
  booktitle    = {Winter Simulation Conference, {WSC} 2022, Singapore, December 11-14,
                  2022},
  pages        = {3394--3405},
  publisher    = {{IEEE}},
  year         = {2022},
  url          = {https://doi.org/10.1109/WSC57314.2022.10015307},
  doi          = {10.1109/WSC57314.2022.10015307},
  timestamp    = {Mon, 26 Jun 2023 20:40:56 +0200},
  biburl       = {https://dblp.org/rec/conf/wsc/DeenenAF22.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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