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"Building a Digital Twin of the Photolithography Area of A Real-World Wafer ..."

Patrick C. Deenen, Rick A. M. Adriaensen, John W. Fowler (2022)

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DOI: 10.1109/WSC57314.2022.10015307

access: closed

type: Conference or Workshop Paper

metadata version: 2023-06-26

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Patrick C. Deenen, Rick A. M. Adriaensen, John W. Fowler:
Building a Digital Twin of the Photolithography Area of A Real-World Wafer FAB To Validate Improved Production Control. WSC 2022: 3394-3405

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