BibTeX record conf/vlsit/LiuCCLHTHCCCL23

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@inproceedings{DBLP:conf/vlsit/LiuCCLHTHCCCL23,
  author       = {Yi{-}Chun Liu and
                  Yu{-}Rui Chen and
                  Yun{-}Wen Chen and
                  Hsin{-}Cheng Lin and
                  Wan{-}Hsuan Hsieh and
                  Chien{-}Te Tu and
                  Bo{-}Wei Huang and
                  Wei{-}Jen Chen and
                  Chun{-}Yi Cheng and
                  Shee{-}Jier Chueh and
                  Chee Wee Liu},
  title        = {Extremely High-{\(\kappa\)} Hf0.2Zr0.8O2 Gate Stacks Integrated into
                  Ge0.95Si0.05 Nanowire and Nanosheet nFETs Featuring Respective Record
                  Ion per Footprint of 9200{\(\mu\)}A/{\(\mu\)}m and Record Ion per
                  Stack of 360{\(\mu\)}A at VOV=VDS=0.5V},
  booktitle    = {2023 {IEEE} Symposium on {VLSI} Technology and Circuits {(VLSI} Technology
                  and Circuits), Kyoto, Japan, June 11-16, 2023},
  pages        = {1--2},
  publisher    = {{IEEE}},
  year         = {2023},
  url          = {https://doi.org/10.23919/VLSITechnologyandCir57934.2023.10185327},
  doi          = {10.23919/VLSITECHNOLOGYANDCIR57934.2023.10185327},
  timestamp    = {Wed, 03 Jan 2024 21:20:23 +0100},
  biburl       = {https://dblp.org/rec/conf/vlsit/LiuCCLHTHCCCL23.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}