BibTeX record conf/vlsit/KangHCG23

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@inproceedings{DBLP:conf/vlsit/KangHCG23,
  author       = {Yuye Kang and
                  Kaizhen Han and
                  Yue Chen and
                  Xiao Gong},
  title        = {Thickness-Engineered Extremely-thin Channel High Performance {ITO}
                  TFTs with Raised {S/D} Architecture: Record-Low RSD, Highest Moblity
                  (Sub-4 nm {TCH} Regime), and High {VTH} Tunability},
  booktitle    = {2023 {IEEE} Symposium on {VLSI} Technology and Circuits {(VLSI} Technology
                  and Circuits), Kyoto, Japan, June 11-16, 2023},
  pages        = {1--2},
  publisher    = {{IEEE}},
  year         = {2023},
  url          = {https://doi.org/10.23919/VLSITechnologyandCir57934.2023.10185421},
  doi          = {10.23919/VLSITECHNOLOGYANDCIR57934.2023.10185421},
  timestamp    = {Fri, 28 Jul 2023 11:11:24 +0200},
  biburl       = {https://dblp.org/rec/conf/vlsit/KangHCG23.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}

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