BibTeX record conf/smc/KimPSWRZBM01

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@inproceedings{DBLP:conf/smc/KimPSWRZBM01,
  author       = {Hansoo Kim and
                  Jonghun Park and
                  SugJe Sohn and
                  Ying Wang and
                  Spyros A. Reveliotis and
                  Chen Zhou and
                  Douglas A. Bodner and
                  Leon F. McGinnis},
  title        = {A high-fidelity, web-based simulator for 300 mm wafer fabs},
  booktitle    = {Proceedings of the {IEEE} International Conference on Systems, Man
                  {\&} Cybernetics: "e-Systems and e-Man for Cybernetics in Cyberspace",
                  Tucson, Arizona, USA, 7-10 October 2001},
  pages        = {1288--1293},
  publisher    = {{IEEE}},
  year         = {2001},
  url          = {https://doi.org/10.1109/ICSMC.2001.973098},
  doi          = {10.1109/ICSMC.2001.973098},
  timestamp    = {Mon, 06 Mar 2023 15:08:32 +0100},
  biburl       = {https://dblp.org/rec/conf/smc/KimPSWRZBM01.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}