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"A high-fidelity, web-based simulator for 300 mm wafer fabs."

Hansoo Kim et al. (2001)

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DOI: 10.1109/ICSMC.2001.973098

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-06

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  - conf/smc/KimPSWRZBM01
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  - https://dblp.org/rec/conf/smc/KimPSWRZBM01
Hansoo Kim, Jonghun Park, SugJe Sohn, Ying Wang, Spyros A. Reveliotis, Chen Zhou, Douglas A. Bodner, Leon F. McGinnis:
A high-fidelity, web-based simulator for 300 mm wafer fabs. SMC 2001: 1288-1293

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