BibTeX record conf/plans/AyaziWJLH23

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@inproceedings{DBLP:conf/plans/AyaziWJLH23,
  author       = {Farrokh Ayazi and
                  Haoran Wen and
                  Gregory Villiam Junek and
                  Zhenming Liu and
                  Chris Heaton},
  title        = {Fully Integrated High-Frequency {MEMS} and {CMOS} Inertial Measurement
                  Systems: Taking a Journey from Silicon to Silicon Carbide},
  booktitle    = {{IEEE/ION} Position, Location and Navigation Symposium, {PLANS} 2023,
                  Monterey, CA, USA, April 24-27, 2023},
  pages        = {18--24},
  publisher    = {{IEEE}},
  year         = {2023},
  url          = {https://doi.org/10.1109/PLANS53410.2023.10139948},
  doi          = {10.1109/PLANS53410.2023.10139948},
  timestamp    = {Fri, 19 Jan 2024 08:33:30 +0100},
  biburl       = {https://dblp.org/rec/conf/plans/AyaziWJLH23.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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