"Fully Integrated High-Frequency MEMS and CMOS Inertial Measurement ..."

Farrokh Ayazi et al. (2023)

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DOI: 10.1109/PLANS53410.2023.10139948

access: closed

type: Conference or Workshop Paper

metadata version: 2024-01-19

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Farrokh Ayazi, Haoran Wen, Gregory Villiam Junek, Zhenming Liu, Chris Heaton:
Fully Integrated High-Frequency MEMS and CMOS Inertial Measurement Systems: Taking a Journey from Silicon to Silicon Carbide. PLANS 2023: 18-24

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