BibTeX record conf/nems/ZhangMJYZJ22

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@inproceedings{DBLP:conf/nems/ZhangMJYZJ22,
  author       = {Tengfei Zhang and
                  Zhipeng Ma and
                  Yiming Jin and
                  Ziyi Ye and
                  Xudong Zheng and
                  Zhonghe Jin},
  title        = {Temperature drift compensation of a tuned low stiffness {MEMS} accelerometer
                  based on double-sided parallel plates},
  booktitle    = {17th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2022, Taoyuan, Taiwan, April 14-17, 2022},
  pages        = {249--252},
  publisher    = {{IEEE}},
  year         = {2022},
  url          = {https://doi.org/10.1109/NEMS54180.2022.9791155},
  doi          = {10.1109/NEMS54180.2022.9791155},
  timestamp    = {Wed, 22 Jun 2022 15:24:48 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/ZhangMJYZJ22.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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