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"Temperature drift compensation of a tuned low stiffness MEMS accelerometer ..."

Tengfei Zhang et al. (2022)

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DOI: 10.1109/NEMS54180.2022.9791155

access: closed

type: Conference or Workshop Paper

metadata version: 2022-06-22

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  dblp key:
  - conf/nems/ZhangMJYZJ22
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  - https://dblp.org/rec/conf/nems/ZhangMJYZJ22
Tengfei Zhang, Zhipeng Ma, Yiming Jin, Ziyi Ye, Xudong Zheng, Zhonghe Jin:
Temperature drift compensation of a tuned low stiffness MEMS accelerometer based on double-sided parallel plates. NEMS 2022: 249-252

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