BibTeX record conf/nems/TanFPCCCL16

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@inproceedings{DBLP:conf/nems/TanFPCCCL16,
  author       = {Wei{-}Siang Tan and
                  Grace W. Fang and
                  Gayathri Pillai and
                  Cheng{-}Chi Chen and
                  Chao{-}Yu Chen and
                  Chi{-}Hang Chin and
                  Sheng{-}Shian Li},
  title        = {Fabrication and characterization of lithium-niobate thin film {MEMS}
                  piezoelectric resonators},
  booktitle    = {11th {IEEE} Annual International Conference on Nano/Micro Engineered
                  and Molecular Systems, {NEMS} 2016, Sendai, Japan, April 17-20, 2016},
  pages        = {516--519},
  publisher    = {{IEEE}},
  year         = {2016},
  url          = {https://doi.org/10.1109/NEMS.2016.7758303},
  doi          = {10.1109/NEMS.2016.7758303},
  timestamp    = {Tue, 21 Mar 2023 21:00:19 +0100},
  biburl       = {https://dblp.org/rec/conf/nems/TanFPCCCL16.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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