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"Fabrication and characterization of lithium-niobate thin film MEMS ..."

Wei-Siang Tan et al. (2016)

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DOI: 10.1109/NEMS.2016.7758303

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-21

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  dblp key:
  - conf/nems/TanFPCCCL16
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Wei-Siang Tan, Grace W. Fang, Gayathri Pillai, Cheng-Chi Chen, Chao-Yu Chen, Chi-Hang Chin, Sheng-Shian Li:
Fabrication and characterization of lithium-niobate thin film MEMS piezoelectric resonators. NEMS 2016: 516-519

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