BibTeX record conf/nems/RanWHCHZ23

• > Home > conf/nems/RanWHCHZ23

@inproceedings{DBLP:conf/nems/RanWHCHZ23,
  author       = {Longqi Ran and
                  Yichuan Wu and
                  Jiangbo He and
                  Binlei Cao and
                  Zongda Hu and
                  Wu Zhou},
  title        = {An Improved SOI-on-Glass Fabrication Method of Large-Area Sheeting
                  of {MEMS} Isolator},
  booktitle    = {18th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2023, Jeju Island, Korea, Republic of, May
                  14-17, 2023},
  pages        = {62--65},
  publisher    = {{IEEE}},
  year         = {2023},
  url          = {https://doi.org/10.1109/NEMS57332.2023.10190975},
  doi          = {10.1109/NEMS57332.2023.10190975},
  timestamp    = {Mon, 14 Aug 2023 15:37:27 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/RanWHCHZ23.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}