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"An Improved SOI-on-Glass Fabrication Method of Large-Area Sheeting of MEMS ..."

Longqi Ran et al. (2023)

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DOI: 10.1109/NEMS57332.2023.10190975

access: closed

type: Conference or Workshop Paper

metadata version: 2023-08-14

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  dblp key:
  - conf/nems/RanWHCHZ23
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  - https://dblp.org/rec/conf/nems/RanWHCHZ23
Longqi Ran, Yichuan Wu, Jiangbo He, Binlei Cao, Zongda Hu, Wu Zhou:
An Improved SOI-on-Glass Fabrication Method of Large-Area Sheeting of MEMS Isolator. NEMS 2023: 62-65

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