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BibTeX record conf/nems/LuoCW14
@inproceedings{DBLP:conf/nems/LuoCW14, author = {Zhenyu Luo and Deyong Chen and Junbo Wang}, title = {Resonant pressure sensor with through-glass electrical interconnect based on {SOI} wafer technology}, booktitle = {9th {IEEE} International Conference on Nano/Micro Engineered and Molecular Systems, {NEMS} 2014, Waikiki Beach, HI, USA, April 13-16, 2014}, pages = {243--246}, publisher = {{IEEE}}, year = {2014}, url = {https://doi.org/10.1109/NEMS.2014.6908800}, doi = {10.1109/NEMS.2014.6908800}, timestamp = {Mon, 23 Oct 2023 15:28:12 +0200}, biburl = {https://dblp.org/rec/conf/nems/LuoCW14.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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