BibTeX record conf/nems/LuoCW14

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@inproceedings{DBLP:conf/nems/LuoCW14,
  author       = {Zhenyu Luo and
                  Deyong Chen and
                  Junbo Wang},
  title        = {Resonant pressure sensor with through-glass electrical interconnect
                  based on {SOI} wafer technology},
  booktitle    = {9th {IEEE} International Conference on Nano/Micro Engineered and Molecular
                  Systems, {NEMS} 2014, Waikiki Beach, HI, USA, April 13-16, 2014},
  pages        = {243--246},
  publisher    = {{IEEE}},
  year         = {2014},
  url          = {https://doi.org/10.1109/NEMS.2014.6908800},
  doi          = {10.1109/NEMS.2014.6908800},
  timestamp    = {Mon, 23 Oct 2023 15:28:12 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/LuoCW14.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}

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