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"Resonant pressure sensor with through-glass electrical interconnect based ..."

Zhenyu Luo, Deyong Chen, Junbo Wang (2014)

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DOI: 10.1109/NEMS.2014.6908800

access: closed

type: Conference or Workshop Paper

metadata version: 2023-10-23

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Zhenyu Luo, Deyong Chen, Junbo Wang:
Resonant pressure sensor with through-glass electrical interconnect based on SOI wafer technology. NEMS 2014: 243-246

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