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BibTeX record conf/nems/LiYY09
@inproceedings{DBLP:conf/nems/LiYY09, author = {Yuan Li and Zhenchuan Yang and Guizhen Yan}, title = {An improved method to remove anti-footing Al layer after {DRIE}}, booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009}, pages = {868--871}, publisher = {{IEEE} Computer Society}, year = {2009}, url = {https://doi.org/10.1109/NEMS.2009.5068712}, doi = {10.1109/NEMS.2009.5068712}, timestamp = {Thu, 23 Mar 2023 23:58:03 +0100}, biburl = {https://dblp.org/rec/conf/nems/LiYY09.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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