BibTeX record conf/nems/LeeSKP11

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@inproceedings{DBLP:conf/nems/LeeSKP11,
  author       = {Dong{-}Yeon Lee and
                  Jaesool Shim and
                  Tae Song Kim and
                  Jae Hong Park},
  title        = {Optimization of functional layers in piezoelectric thick film {MEMS}
                  process},
  booktitle    = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
                  Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages        = {64--67},
  publisher    = {{IEEE}},
  year         = {2011},
  url          = {https://doi.org/10.1109/NEMS.2011.6017296},
  doi          = {10.1109/NEMS.2011.6017296},
  timestamp    = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/LeeSKP11.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}

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