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"Optimization of functional layers in piezoelectric thick film MEMS process."

Dong-Yeon Lee et al. (2011)

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DOI: 10.1109/NEMS.2011.6017296

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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  dblp key:
  - conf/nems/LeeSKP11
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  - https://dblp.org/rec/conf/nems/LeeSKP11
Dong-Yeon Lee, Jaesool Shim, Tae Song Kim, Jae Hong Park:
Optimization of functional layers in piezoelectric thick film MEMS process. NEMS 2011: 64-67

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