BibTeX record conf/nems/HuangZXJYLWWJ20

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@inproceedings{DBLP:conf/nems/HuangZXJYLWWJ20,
  author       = {Mimi Huang and
                  Libo Zhao and
                  Tingzhong Xu and
                  Chen Jia and
                  Ping Yang and
                  Zhikang Li and
                  Hongyan Wang and
                  Yongshun Wu and
                  Zhuangde Jiang},
  title        = {A Novel Peninsula-island Structure for Sensing Ultra-low Pressure
                  Based on Dry-wet Combination Etching Process},
  booktitle    = {15th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular System, {NEMS} 2020, San Diego, CA, USA, September 27-30,
                  2020},
  pages        = {167--170},
  publisher    = {{IEEE}},
  year         = {2020},
  url          = {https://doi.org/10.1109/NEMS50311.2020.9265584},
  doi          = {10.1109/NEMS50311.2020.9265584},
  timestamp    = {Fri, 10 Nov 2023 21:09:38 +0100},
  biburl       = {https://dblp.org/rec/conf/nems/HuangZXJYLWWJ20.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}