Stop the war!

Остановите войну!

for scientists:

default search action

combined dblp search
author search
venue search
publication search

ask others

"A Novel Peninsula-island Structure for Sensing Ultra-low Pressure Based on ..."

Mimi Huang et al. (2020)

> Home

Details and statistics

DOI: 10.1109/NEMS50311.2020.9265584

access: closed

type: Conference or Workshop Paper

metadata version: 2023-11-10

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - conf/nems/HuangZXJYLWWJ20
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/conf/nems/HuangZXJYLWWJ20
Mimi Huang, Libo Zhao, Tingzhong Xu, Chen Jia, Ping Yang, Zhikang Li, Hongyan Wang, Yongshun Wu, Zhuangde Jiang:
A Novel Peninsula-island Structure for Sensing Ultra-low Pressure Based on Dry-wet Combination Etching Process. NEMS 2020: 167-170

a service of

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.