BibTeX record conf/nems/HuangCCSH14

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@inproceedings{DBLP:conf/nems/HuangCCSH14,
  author       = {Mao{-}Jung Huang and
                  Nien{-}Nan Chu and
                  Chun{-}Ming Chang and
                  Ming{-}Hua Shiao and
                  Chien{-}Nan Hsiao},
  title        = {Development of catalytic etching using dual materials},
  booktitle    = {9th {IEEE} International Conference on Nano/Micro Engineered and Molecular
                  Systems, {NEMS} 2014, Waikiki Beach, HI, USA, April 13-16, 2014},
  pages        = {551--554},
  publisher    = {{IEEE}},
  year         = {2014},
  url          = {https://doi.org/10.1109/NEMS.2014.6908872},
  doi          = {10.1109/NEMS.2014.6908872},
  timestamp    = {Fri, 13 Aug 2021 09:26:01 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/HuangCCSH14.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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