"Development of catalytic etching using dual materials."

Mao-Jung Huang et al. (2014)

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DOI: 10.1109/NEMS.2014.6908872

access: closed

type: Conference or Workshop Paper

metadata version: 2021-08-11

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Mao-Jung Huang, Nien-Nan Chu, Chun-Ming Chang, Ming-Hua Shiao, Chien-Nan Hsiao:
Development of catalytic etching using dual materials. NEMS 2014: 551-554

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