BibTeX record conf/nems/FeiR20

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@inproceedings{DBLP:conf/nems/FeiR20,
  author       = {Sitao Fei and
                  Hao Ren},
  title        = {A Contour Mode {AIN} Piezoelectric Resonator based on {SOI} Substrate},
  booktitle    = {15th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular System, {NEMS} 2020, San Diego, CA, USA, September 27-30,
                  2020},
  pages        = {180--183},
  publisher    = {{IEEE}},
  year         = {2020},
  url          = {https://doi.org/10.1109/NEMS50311.2020.9265593},
  doi          = {10.1109/NEMS50311.2020.9265593},
  timestamp    = {Thu, 03 Dec 2020 10:20:10 +0100},
  biburl       = {https://dblp.org/rec/conf/nems/FeiR20.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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