"A Contour Mode AIN Piezoelectric Resonator based on SOI Substrate."

Sitao Fei, Hao Ren (2020)

> Home

Details and statistics

DOI: 10.1109/NEMS50311.2020.9265593

access: closed

type: Conference or Workshop Paper

metadata version: 2020-12-03

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - conf/nems/FeiR20
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/conf/nems/FeiR20
Sitao Fei, Hao Ren:
A Contour Mode AIN Piezoelectric Resonator based on SOI Substrate. NEMS 2020: 180-183

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.