BibTeX record conf/nems/ChanWWMCCCLT10

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@inproceedings{DBLP:conf/nems/ChanWWMCCCLT10,
  author       = {Yick Chuen Chan and
                  Chun Cheong Wong and
                  Congshun Wang and
                  Wei Ma and
                  Ho{-}Yin Chan and
                  Shoulung Chen and
                  Hon Lung Cheung and
                  Francis Chee Shuen Lee and
                  Chen{-}Jung Tsai},
  title        = {Design and fabrication of a {MEMS} scanning mirror with and without
                  comb offset},
  booktitle    = {5th {IEEE} International Conference on Nano/Micro Engineered and Molecular
                  Systems, {NEMS} 2010, Xiamen, China, January 20-23, 2010},
  pages        = {186--190},
  publisher    = {{IEEE}},
  year         = {2010},
  url          = {https://doi.org/10.1109/NEMS.2010.5592180},
  doi          = {10.1109/NEMS.2010.5592180},
  timestamp    = {Tue, 13 Feb 2024 20:46:00 +0100},
  biburl       = {https://dblp.org/rec/conf/nems/ChanWWMCCCLT10.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}