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"Design and fabrication of a MEMS scanning mirror with and without comb offset."
Yick Chuen Chan et al. (2010)
- Yick Chuen Chan, Chun Cheong Wong, Congshun Wang, Wei Ma, Ho-Yin Chan
, Shoulung Chen, Hon Lung Cheung, Francis Chee Shuen Lee, Chen-Jung Tsai:
Design and fabrication of a MEMS scanning mirror with and without comb offset. NEMS 2010: 186-190
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