BibTeX record conf/nems/CaoHZ21

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@inproceedings{DBLP:conf/nems/CaoHZ21,
  author       = {Tongtong Cao and
                  Tengjiang Hu and
                  Yulong Zhao},
  title        = {Design and Fabrication of {A} latching Silicon-based {MEMS} Switch},
  booktitle    = {16th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2021, Xiamen, China, April 25-29, 2021},
  pages        = {1405--1409},
  publisher    = {{IEEE}},
  year         = {2021},
  url          = {https://doi.org/10.1109/NEMS51815.2021.9451483},
  doi          = {10.1109/NEMS51815.2021.9451483},
  timestamp    = {Mon, 28 Jun 2021 16:07:08 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/CaoHZ21.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}

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