"Design and Fabrication of A latching Silicon-based MEMS Switch."

Tongtong Cao, Tengjiang Hu, Yulong Zhao (2021)

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DOI: 10.1109/NEMS51815.2021.9451483

access: closed

type: Conference or Workshop Paper

metadata version: 2021-06-28

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Tongtong Cao, Tengjiang Hu, Yulong Zhao:
Design and Fabrication of A latching Silicon-based MEMS Switch. NEMS 2021: 1405-1409

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