BibTeX record conf/nems/BonitzBHSGHW16

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@inproceedings{DBLP:conf/nems/BonitzBHSGHW16,
  author       = {Jens Bonitz and
                  Simon B{\"{o}}ttger and
                  Sascha Hermann and
                  Stefan E. Schulz and
                  Thomas Gessner and
                  Steffen Hartmann and
                  Bernhard Wunderle},
  title        = {Wafer-level technology for integration of carbon nanotubes into micro-electro-mechanical
                  systems},
  booktitle    = {11th {IEEE} Annual International Conference on Nano/Micro Engineered
                  and Molecular Systems, {NEMS} 2016, Sendai, Japan, April 17-20, 2016},
  pages        = {595--599},
  publisher    = {{IEEE}},
  year         = {2016},
  url          = {https://doi.org/10.1109/NEMS.2016.7758322},
  doi          = {10.1109/NEMS.2016.7758322},
  timestamp    = {Sat, 30 Sep 2023 09:53:53 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/BonitzBHSGHW16.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}