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"Wafer-level technology for integration of carbon nanotubes into ..."

Jens Bonitz et al. (2016)

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DOI: 10.1109/NEMS.2016.7758322

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-30

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Jens Bonitz, Simon Böttger, Sascha Hermann, Stefan E. Schulz, Thomas Gessner, Steffen Hartmann, Bernhard Wunderle:
Wafer-level technology for integration of carbon nanotubes into micro-electro-mechanical systems. NEMS 2016: 595-599

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